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Cleanroom Facilities & Capabilities

We operate state-of-the-art controlled environments designed for micro- and nano-fabrication, optics assembly, and sensitive hardware validation.

Technical Specifications

  • Environmental Control: ISO Class 5 (Class 100) and ISO Class 7 (Class 10,000) operational zones.
  • Temperature Stability: Maintained at 21°C ± 0.5°C.
  • Humidity Controls: Regulated at 45% ± 5% relative humidity to eliminate electrostatic discharge risks.

Available Equipment & Workstations

  1. Lithography Station: Sub-micron resolution imaging and alignment systems.
  2. Metrology Suite: High-resolution scanning electron microscopy (SEM) and optical profilometry.
  3. Chemical Processing: Dedicated acid and solvent fume hoods with ultra-pure DI water loops (18 MΩ·cm).
  4. deposition processing: Controllable thin layer deposition and sputtering using sputtering, ALD, etc.